Sources

Sources include:

  • thermal sources

  • semi-conductor devices:

    • LEDs

    • Vertical cavity surface emitting laser (VCEL)

We can notice that these devices using Microsystems micro-fabrication technologies are not always considered Microsystems. But the integration resources prove that they are obviously part of more complex Microsystems.

Exemple

Example of VCEL[1]:

Those micro-lasers can be tunable by micro-displacements of the deformable mirror of the cavity output.