Bibliography
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Judy J.W., MEMS: fabrication, design and applications, Journal of Smart Materials and Structures
Tabeling P., Les microsystèmes, Revue de la SFP, Juin 2001
Kim S. et al., MEMS for optical functionality, Journal of Electroceramics Vol 12 - 2004
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Muralt P., J. Micromech. Microeng., Vol 10 - 2000
Hung E.S. et al., Journal of Microelectromechanical Systems, Vol 8 - 1999
Kim S. et al., Journal of the Society of Information Display, Vol 8 - 2000
Van Kessel P.F. et al., A MEMS based projection system, IEEE Proceedings, Vol 86 - 1998
Garrigues N. et al., III-V semiconductors based MOEMS devices for optical telecommunications, Microelectronics Engineering, Vol 61-62 - 2002
Marsh G., Micromachinery, rolling at last ?, Materials Today, July/August 2002
Carenco A. et al., Active opto-electronic components, Comptes-Rendus de Physique, Vol 4 - 2003
Petersen K.E., Silicon as a mechanical material, IEEE Proceedings, May 2002
Wu M.C. Et al., Optical MEMS for Lightwave Communications, Journal of Lightwave Technologies, Vol 24, Iss 12 - 2006
Lee H.K. et al., IEEE Trans. On Electron Devices, Vol 47 - 1999
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Wong C. et al., Applied Optics, Vol 42 - 2003
Solgaard O. et al., Introduction to the issue on Optical Mirco and Nana systems, IEEE Journal of selected topics in Quantum Electronics, Vol 13 March-April 2007
Internet ressources
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http://www.promoptica.be/publications/moemss.pdf, Venus tout droit du pays des lilliputiens, les MOEMS vont envahir l'espace
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http://www.redbooks.ibm.com, Understanding optical communications
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http://www.cea-technologies.com
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http://code-6330.nrl.navy.mil/6336/moems.htm, Optics and MEMS, NRL report NRL/MR/6336-99-7975
Conference / Symposium
Presentation au Manufacturing Modeling Lab, Introduction to MEMS, Stanford University, 2004
SPIE Photonics East 2000, A design flow for MEMS, Boston, SPIE, 2000
March American Physical Society Meeting, Short course on Optical-MEMS, Seattle, American Physical Society, 2001
International Workshop on future trends in microelectronics: the nano millenium, Ile de Bendor, France, 2001