Application to micro-optics

Tabib-Azar M., Integrated optics, Microstructures, and Sensors, Kluwer Academic Publisher, Boston, MA, 1995

Judy J.W., MEMS: fabrication, design and applications, Journal of Smart Materials and Structures

Tabeling P., Les microsystèmes, Revue de la SFP, Juin 2001

Kim S. et al., MEMS for optical functionality, Journal of Electroceramics Vol 12 - 2004

Wood R.A. et al., Proceeding IEEE, 1992

Muralt P., J. Micromech. Microeng., Vol 10 - 2000

Hung E.S. et al., Journal of Microelectromechanical Systems, Vol 8 - 1999

Kim S. et al., Journal of the Society of Information Display, Vol 8 - 2000

Van Kessel P.F. et al., A MEMS based projection system, IEEE Proceedings, Vol 86 - 1998

Garrigues N. et al., III-V semiconductors based MOEMS devices for optical telecommunications, Microelectronics Engineering, Vol 61-62 - 2002

Marsh G., Micromachinery, rolling at last ?, Materials Today, July/August 2002

Carenco A. et al., Active opto-electronic components, Comptes-Rendus de Physique, Vol 4 - 2003

Petersen K.E., Silicon as a mechanical material, IEEE Proceedings, May 2002

Wu M.C. Et al., Optical MEMS for Lightwave Communications, Journal of Lightwave Technologies, Vol 24, Iss 12 - 2006

Lee H.K. et al., IEEE Trans. On Electron Devices, Vol 47 - 1999

Dangel R. et al., Optics Communications, Vol 156 - 1998

Wu M.S. et al., Electronics Letters, Vol 31 - 1995

Khinoshita S. et al., Electronics Letters, Vol 24 - 1988

Wong C. et al., Applied Optics, Vol 42 - 2003

Solgaard O. et al., Introduction to the issue on Optical Mirco and Nana systems, IEEE Journal of selected topics in Quantum Electronics, Vol 13 March-April 2007